Ballif, ChristopheWyrsch, NicolasFranco, Andrea2014-08-182014-08-182014-08-18201410.5075/epfl-thesis-6290https://infoscience.epfl.ch/handle/20.500.14299/105866urn:nbn:ch:bel-epfl-thesis6290-4enamorphous siliconmicrochannel platesmonolithic integrationsecondary electronssecondary emissive layerelectronmultiplicationcharge replenishmentvacuumdetectorthin film on ASICTFA detectorsolid-state detectorplasma-enhanced chemical vapor depositionmicrocrystalline silicondangling bondsthesis::doctoral thesis