Pagliano, SimoneMarschner, David E.Maillard, DamienEhrmann, NilsStemme, GoranBraun, StefanVillanueva, Luis GuillermoNiklaus, Frank2023-06-052023-06-052023-06-052023-01-0110.1109/MEMS49605.2023.10052385https://infoscience.epfl.ch/handle/20.500.14299/197981WOS:0009753592001563D printing of MEMS devices could enable the cost-efficient production of custom-designed and complex 3D MEMS for prototyping and for low-volume applications. In this work, we present the first micro 3D-printed functional MEMS accelerometers using two-photon polymerization combined with the evaporation of metal strain gauge transducers. We measured the resonance frequency, the responsivity, and the signal stability over a period of 10 h of the 3D-printed accelerometer.Engineering, Electrical & ElectronicEngineering, MechanicalNanoscience & NanotechnologyEngineeringScience & Technology - Other Topics3d printingtwo-photon polymerizationshadow maskingstrain gauge transducerlaser doppler vibrometercustom memslow-volume manufacturingtext::conference output::conference proceedings::conference paper