Cosentino, ArmandoTan, QingRoussey, MatthieuHerzig, Hans Peter2010-12-082010-12-082010-12-082010https://infoscience.epfl.ch/handle/20.500.14299/61983The fabrication of a slot waveguide cavity oriented to sensing application is demonstrated. The choice of materials and the development of the process flow steps, including E-beam lithography (EBL) and metal lift-off of a single thin layer, are illustrated and discussed to obtain 30 nm width slots in a thin gold layer.sensing applicationtext::conference output::conference paper not in proceedings