Villanueva, G.Plaza, J. A.Sanchez-Amores, A.Bausells, J.Martinez, E.Samitier, J.Errachid, A.2013-08-062013-08-062013-08-06200510.1109/SCED.2005.1504477https://infoscience.epfl.ch/handle/20.500.14299/93868FIB and DRIE combination for nanotip fabricationtext::conference output::conference proceedings::conference paper