Buser, R.de Rooij, N. F.Schultheis, L.2009-05-122009-05-122009-05-12199110.1016/0924-4247(91)87076-Fhttps://infoscience.epfl.ch/handle/20.500.14299/39128Silicon Pressure Sensor Based on a Resonating Elementtext::journal::journal article::research article