Taheri Mousavi, Seyedeh MohadesehChambart, Marion EstelleMolinari, Jean-François2013-02-142013-02-142013-02-142010https://infoscience.epfl.ch/handle/20.500.14299/88839Presenting the goals of my Ph.D. projectIndentation induced damage in silicon nitridetext::conference output::conference poster not in proceedings