Cuche, E.Bevilacqua, F.Depeursinge, C.2009-07-202009-07-202009-07-20199910.1364/OL.24.000291https://infoscience.epfl.ch/handle/20.500.14299/41492WOS:000078973600007We present a new application of digital holography for phase- contrast imaging and optical metrology. This holographic imaging technique uses a CCD camera for recording of a digital Fresnel off-axis hologram and a numerical method for hologram reconstruction. The method simultaneously provides an amplitude- contrast image and a quantitative phase-contrast image. An application to surface profilometry is presented and shows excellent agreement with contact- stylus probe measurements. (C) 1999 Optical Society of America.[MVD]Detectors : CCD, charge-coupled deviceHolography : HolographyInstrumentation, measurement, and metrology : MetrologyInstrumentation, measurement, and metrology : Phase measurementMachine vision : Three-dimensional sensingtext::journal::journal article::research article