Staufer, U.Aeschimann, L.Akiyama, T.Gautsch, S.de Rooij, N. F.2009-05-122009-05-122009-05-122002https://infoscience.epfl.ch/handle/20.500.14299/39884MEMS based Nanotools for Detection and Manipulation at the Molecular Leveltext::conference output::conference proceedings::conference paper