Plessky, VictorYandrapalli, SoumyaTurner, Patrick J.Villanueva, Luis G.Koskela, JuliusFaizan, MuhammadDe Pastina, AnnalisaGarcia, BryantCosta, JimHammond, Robert B.2019-11-292019-11-292019-11-292019-01-0110.1109/MWSYM.2019.8700876https://infoscience.epfl.ch/handle/20.500.14299/163450WOS:000494461700132In a free ZY-LiNbO3 400nm thick platelet, narrow electrodes (500nm wide) placed periodically with a pitch of few micrometers can eXcite standing Bulk Acoustic shear wave Resonances (XBARs), by means of lateral electric field parallel to crystalline Y- axis. The resonance frequency of around 4.8GHz and 13.6GHz are suitable for development of RF filters. The XBARs 3rd, 5th and even 9th harmonics were observed up to 38 GHz.Engineering, Electrical & ElectronicTelecommunicationsEngineeringlithium niobatebulk acoustic wavesfbarsihp5 ghz resonators5g phonesq-factorlamb modesmemsxbarsLaterally excited bulk wave resonators (XBARs) based on thin Lithium Niobate platelet for 5GHz and 13 GHz filterstext::conference output::conference proceedings::conference paper