Fabrication of Silicon-On-Insulator MEM Resonators with Deep Sub-Micron Transduction Gaps

Badila, N.-D.Hibert, C.Mazza, M.Ionescu, A. M.2007-05-162007-05-162007-05-16200710.1007/s00542-006-0349-yhttps://infoscience.epfl.ch/handle/20.500.14299/6964WOS:000245806000036Fabrication of Silicon-On-Insulator MEM Resonators with Deep Sub-Micron Transduction Gapstext::conference output::conference proceedings::conference paper