High uniformity deposition with chemical beams in high vacuum

Benvenuti, G.Halary-Wagner, E.Brioude, A.Hoffmann, P.2009-07-202009-07-202009-07-202002https://infoscience.epfl.ch/handle/20.500.14299/41724WOS:0001825732000813687[NRG]High uniformity deposition with chemical beams in high vacuumtext::conference output::conference proceedings::conference paper