Leroy, ChristinePisani, Marcelo B.Hibert, CyrilleBouvet, DidierPuech, M.Ionescu, Adrian M.2006-05-102006-05-102006-05-10200710.1007/s00542-006-0364-zhttps://infoscience.epfl.ch/handle/20.500.14299/23008811993High Quality Factor Copper Inductors Integrated in Deep Dry Etched Quartz Substratestext::conference output::conference proceedings::conference paper