Process optimization for the sputter deposition of molybdenum thin films as electrode for AlN thin films

Martin, F.Muralt, P.Dubois, M. A.2007-10-182007-10-182007-10-18200610.1116/1.2201042https://infoscience.epfl.ch/handle/20.500.14299/13094WOS:0002390481000098939Process optimization for the sputter deposition of molybdenum thin films as electrode for AlN thin filmstext::journal::journal article::research article