Weible, K. J.Völkel, R.Eisner, M.Hoffmann, S.Scharf, T.Herzig, H. P.2009-04-222009-04-222009-04-22200410.1117/12.545458https://infoscience.epfl.ch/handle/20.500.14299/37929Metrology of refractive microlens arraystext::conference output::conference proceedings::conference paper