Akiyama, T.Staufer, U.de Rooij, N. F.Frederix, P.Engel, A.2009-05-122009-05-122009-05-12200310.1063/1.1523631https://infoscience.epfl.ch/handle/20.500.14299/38931The dynamic mode atomic force microscopy based on a microfabricated cantilever and a commercial quartz tuning fork was probed. The probe was self-sensing and self-actuating. The tuning fork performed the function of a force sensor. The amplitude and frequency of the tuning fork governed the tip vibration, while the cantilever determined the spring constant.Symmetrically arranged quartz tuning fork with soft cantilever for intermittent contact mode atomic force microscopytext::journal::journal article::research article