Rossi, MarkusSchütz, HelmutEhbets, PeterHerzig, Hans PeterProngué, DamienGale, Michael T.2013-01-162013-01-162013-01-16199310.1364/AO.32.002526https://infoscience.epfl.ch/handle/20.500.14299/87888Density (optical)Diffractive optical elementsLaser beamsLithographyContinuous-relief diffractive optical elements for two-dimensional array generationtext::journal::journal article::research article