Edinger, PierreJo, GaehunNguyen, Chris Phong VanTakabayashi, Alain YujiErrando-Herranz, CarlosAntony, CleitusTalli, GiuseppeVerheyen, PeterKhan, UmarBleiker, Simon J.Bogaerts, WimQuack, NielsNiklaus, FrankGylfason, Kristinn B.2023-03-272023-03-272023-03-272023-02-1310.1364/OE.480219https://infoscience.epfl.ch/handle/20.500.14299/196546WOS:000942062500006Ring resonators are a vital element for filters, optical delay lines, or sensors in silicon photonics. However, reconfigurable ring resonators with low-power consumption are not available in foundries today. We demonstrate an add-drop ring resonator with the independent tuning of round-trip phase and coupling using low-power microelectromechanical (MEMS) actuation. At a wavelength of 1540 nm and for a maximum voltage of 40 V, the phase shifters provide a resonance wavelength tuning of 0.15 nm, while the tunable couplers can tune the optical resonance extinction ratio at the through port from 0 to 30 dB. The optical resonance displays a passive quality factor of 29 000, which can be increased to almost 50 000 with actuation. The MEMS rings are individually vacuum-sealed on wafer scale, enabling reliable and long-term protection from the environment. We cycled the mechanical actuators for more than 4 x 109 cycles at 100 kHz, and did not observe degradation in their response curves. On mechanical resonance, we demonstrate a modulation increase of up to 15 dB, with a voltage bias of 4 V and a peak drive amplitude as low as 20 mV.(c) 2023 Optica Publishing Group under the terms of the Optica Open Access Publishing AgreementOpticsOpticsbackscatteringtext::journal::journal article::research article