Toy, M. F.Ferhanoglu, O.Urey, H.2011-01-212011-01-212011-01-212007https://infoscience.epfl.ch/handle/20.500.14299/63220Diffraction gratings integrated with MEMS has many applications as they can offer shot noise limited sub-nm displacement detection sensitivities but are limited in range. A two-wavelength readout method is developed that maintains high sensitivity while increasing the detection range from 105nm to 1.7um assuming sensitivity is maintained at > 50% of the maximum sensitivity.optical sensinggrating interferometryMEMS metrologytext::conference output::conference poster not in proceedings