Kippenberg, TobiasBhave, SunilTian, HaoRiemensberger, JohannLikhachev, GrigoriiSiddharth, Anat2022-10-032022-10-032022-10-032022https://infoscience.epfl.ch/handle/20.500.14299/191153The present invention relates to an electrically tunable photonic resonator device for a component having a fast and flat actuation response, comprising: - At least one optical waveguide with an optical interface for coupling in laser light, - At least one optical resonator including a waveguide being made of an optical resonator material, particularly Si3N4, wherein laser light coupled via the at least one optical waveguide is coupled into the at least one optical resonator, - At least one piezo actuator to apply mechanical stress at least partially onto the at least one optical resonator; wherein the at least one optical resonator, the at least one piezo actuator and the at least one optical waveguide are monolithically integrated on a common substrate of the photonic resonator device; - a mechanical mode suppression means configured to attenuate one or more mechanical modes of oscillation caused by an AC operation of the at least one piezo actuator.patentJP2024510991EP4305717WO202218899074947363