Ultra-smooth silicon nitride waveguides based on the Damascene reflow process: fabrication and loss origins

Pfeiffer, MHPLiu, JQRaja, ASMorais, TGhadiani, BKippenberg, TJ2018-11-082018-11-082018-11-08201810.1364/OPTICA.5.000884https://infoscience.epfl.ch/handle/20.500.14299/151177WOS:000439429000019Ultra-smooth silicon nitride waveguides based on the Damascene reflow process: fabrication and loss originstext::journal::journal article::research article