Kippenberg, TobiasTan, ZelinWang, Rui2023-07-032023-07-032023-07-032023https://infoscience.epfl.ch/handle/20.500.14299/198812The present invention concerns a method for producing at least one ferroelectric device or structure comprising the steps of providing at least one ferroelectric material or layer, or providing at least one ferroelectric material or layer to be patterned or structured; depositing at least one adhesion layer on a first side of the at least one ferroelectric material or layer; and depositing at least one diamond-like carbon layer or material on the at least one adhesion layer.patentWO202311892680001351