de Rooij, NicoGautsch, SebastianLoizeau, Frédéric2014-02-242014-02-242014-02-24201410.5075/epfl-thesis-6100https://infoscience.epfl.ch/handle/20.500.14299/101155urn:nbn:ch:bel-epfl-thesis6100-2enMicrosystemsMicrofabricationPiezoresistive readoutCell force spectroscopyNanomechanical sensorsElectronic noseMicrofabricated Sensor Arrays for Life Science Applicationsthesis::doctoral thesis