Metz, StefanHolzer, RaphaelRenaud, PhilippeObermeier, E.2005-09-132005-09-13200110.1007/978-3-642-59497-7_280https://infoscience.epfl.ch/handle/20.500.14299/216172This paper describes the fabrication of polyimide-based microelectrodes with embedded fluidic microchannels. The thin-film structures combine for the first time a fluidic system with microelectrodes for recording and stimulation of biological signals on a flexible, implantable substrate. Microchannels were realized by a modified lamination technique and combined with a polyimide- platinum-polyimide sandwich structure. The probes can be used for monitoring cellular responses to various chemical stimuli delivered with high spatial precision.polyimidetext::conference output::conference proceedings::conference paper