Continuous-relief fan-out elements with optimized fabrication tolerances

Ehbets, P.Rossi, M.Herzig, H. P.2009-04-222009-04-222009-04-22199510.1117/12.215507https://infoscience.epfl.ch/handle/20.500.14299/37661Continuous-relief fan-out elements with optimized fabrication tolerancestext::journal::journal article::research article