Effect of Beam Parameters in Electron Beam Induced Deposition of Rhodium from a Carbon Free Precursor: A Systematic Study

Cicoira, F.Utke, I.Hoffmann, P.Dwir, B.Leifer, K.Kapon, E.Laub, D.Mathieu, H. J.Doppelt, P.2009-07-202009-07-202009-07-202000https://infoscience.epfl.ch/handle/20.500.14299/41687[NRG]Effect of Beam Parameters in Electron Beam Induced Deposition of Rhodium from a Carbon Free Precursor: A Systematic Studytext::conference output::conference proceedings::conference paper