Micromachined SPM probes with sub-100 nm features at tip apex

Schürmann, G.Indermühle, P.-F.Staufer, U.de Rooij, N. F.2009-05-122009-05-122009-05-12199910.1002/(SICI)1096-9918(199905/06)27:5/6<299::AID-SIA510>3.0.CO;2-Vhttps://infoscience.epfl.ch/handle/20.500.14299/39844Micromachined SPM probes with sub-100 nm features at tip apextext::journal::journal article::research article