Kim, M.-S.Scharf, T.Nguyen, D.Keeler, E.Rydberg, S.Nakagawa, W.Osowiecki, G.Voelkel, R.Herzig, HP2013-06-202013-06-202013-06-20201310.1117/1.JMM.12.2.023015https://infoscience.epfl.ch/handle/20.500.14299/92920WOS:000322078300024We report on the light confinement effect observed in nonideally shaped (i.e., nonspherical) nanoscale solid immersion lenses (SIL). To investigate this effect, nanostructures of various shapes are fabricated by electron-beam lithography. When completely melted in reflow, these noncircular pillars become spherical, while incomplete melting results in nonspherically shaped SILs. Optical characterization shows that nonideal SILs exhibit a spot size reduction comparable with that of spherical SILs. When the size of the SIL is of wavelength scale or smaller, aberrations are negligible due to the short optical path length. This insensitivity to minor variations in the shape implies a large tolerance in nano-SIL fabricationsolid immersion lensnano-fabricationelectron beam lithographythermal reflowsoft lithographyhigh-resolution interference microscopetext::journal::journal article::research article