Moser, YvesForti, RiccardoJiguet, SébastienLehnert, ThomasGijs, M. A. M.2010-09-082010-09-082010-09-08201110.1007/s10404-010-0657-5https://infoscience.epfl.ch/handle/20.500.14299/53443WOS:000286199700019SU-8 photoresist is commonly used in the field of microfabrication as structural material or for molding of microfluidic devices. One major limitation, however, is the difficulty to process partially freestanding SU-8 structures or monolithic closed cavities and channels on-chip. We propose here a simple method for the fabrication of suspended structures, in particular of monolithic SU-8 microchannels. The method is based on the processing of a SU-8 doublelayer. Appropriate modification of the optical properties of the upper layer allows for selective crosslinking in the layer sandwich. This process is suitable for versatile layouts comprising open and hollow SU-8 structures on the same chip.SU-8Monolithic microchannelDouble-layerSuspended SU-8 structures for monolithic microfluidic channelstext::journal::journal article::research article