Herzig, H. P.Nussbaum, Ph.Schilling, A.Traut, S.Philipoussis, I.Ossmann, C.Völkel, R.Rossi, M.Schift, H.2009-04-222009-04-222009-04-22199810.1364/DOMO.1998.DThC.2https://infoscience.epfl.ch/handle/20.500.14299/37732Different concepts for the fabrication of hybrid (refractive/diffractive) elementstext::conference output::conference proceedings::conference paper