Tölke, R.Evans, A.Rupp, J. L. M.Bieberle-Hütter, A.Schlupp, M. V. F.Scherrer, B.Prestat, M.Gauckler, L. J.Courbat, J.Briand, D.de Rooij, N. F.Muralt, P.Yan, Y.Schaer, R.Böni, H.2011-08-092011-08-092011-08-092011https://infoscience.epfl.ch/handle/20.500.14299/69933Due to their high specific energy and energy density, micro-solid oxide fuel cells1,2 (µ-SOFCs) are seen as one of the technologies that could help satisfying the continuously increasing demand for electric energy in portable electronic devices. The µ-SOFC is a less than 1 µm thin free-standing membrane. The membrane consists of ceramic and metallic thin film layers integrated on a micro-structurable substrate based on MEMS technologies. In this study, Foturan® glass ceramic and silicon µ-SOFCs substrates are compared in terms of etching behavior, mechanical and thermomechanical propertiestext::conference output::conference poster not in proceedings