Self-Sharpening Tip Integrated on Micro Cantilevers with Self-Exciting Piezoelectric Sensor for Parallel Atomic Force Microscopy

Indermühle, P.-F.Schürmann, G.Racine, G.-A.de Rooij, N. F.2009-05-122009-05-122009-05-12199710.1063/1.118817https://infoscience.epfl.ch/handle/20.500.14299/39430Self-Sharpening Tip Integrated on Micro Cantilevers with Self-Exciting Piezoelectric Sensor for Parallel Atomic Force Microscopytext::journal::journal article::research article