SAMs meet MEMS - surface modification with self-assembled monolayers for the dry-demolding of photoplastic MEMS/NEMS

Kim, B JKim, G MLiebau, MHuskens, JReinhoudt, D NBrugger, J2007-04-132007-04-132007-04-13200110.1109/MEMSYS.2001.906490https://infoscience.epfl.ch/handle/20.500.14299/4641SAMs meet MEMS - surface modification with self-assembled monolayers for the dry-demolding of photoplastic MEMS/NEMStext::conference output::conference proceedings::conference paper