Vazquez-Mena, O.Sannomiya, T.Tosun, M.Voros, J.Villanueva, G.Brugger, J.2009-03-102009-03-102009-03-10200910.1109/SENSOR.2009.5285463https://infoscience.epfl.ch/handle/20.500.14299/35853Analysis and Applications of Nanostructures Created by Stencil Lithographytext::conference output::conference proceedings::conference paper