Thomet, Jonathan2024-03-142024-03-142024-03-142023-09-1410.5075/epfl-PV-LAB-309574https://infoscience.epfl.ch/handle/20.500.14299/206119Raw experimental data sorted by toolenInGaN PECVDPV applicationsProfilodataset0229abf3-476c-407b-87b5-0ec487764096