Bunday, BenjaminCordes, AaronAllgair, JohnTileli, VasilikiAvitan, YohananPeltinov, RamBar-zvi, MaayanAdan, OferCottrell, EricHand, Sean2016-04-222016-04-222016-04-22200910.1117/12.816249https://infoscience.epfl.ch/handle/20.500.14299/125820Phenomenology of electron-beam-induced photoresist shrinkage trendstext::conference output::conference proceedings::conference paper