Canonica, MichaelNoell, Wilfriedde Rooij, NicoZamkotsian, FredericLanzoni, Patrick2012-06-122012-06-122012-06-12201110.1109/OMEMS.2011.6031047https://infoscience.epfl.ch/handle/20.500.14299/81617WOS:000297850100053MEMS-based programmable slit masks are developed for multi-object spectroscopy in astronomy. Devices with 2048 tiltable micromirrors were fabricated using multiple wafer-level bonding and implemented with individual addressing of each element.MoemsMemsmicromirrorlarge arraymulti-object spectroscopycryogenic applicationprogrammable slit maskAddressable MEMS slit mask for multi-object spectroscopy based on multi-wafer stackingtext::conference output::conference proceedings::conference paper