Sun, PengfeiWeng, JunjieIshihara, RyoichiCharbon, Edoardo2018-08-132018-08-132018-08-132017https://infoscience.epfl.ch/handle/20.500.14299/147748We present the first flexible dual-side single-photon avalanche diode (SPAD) image sensor in array format. The image sensor comprises 32x32 pixels, whereas a special layout and fabrication flow were developed to fabricate the sensor. SPAD breakdown voltage, noise, sensitivity and crosstalk were thoroughly analyzed. The sensor is operated both in frontside- (FSI) and backside-illumination (BSI), whereas a dual-objective camera demo was built to simultaneously demonstrate the sensor in FSI and BSI modes.A Flexible 32x32 Dual-Side Single-Photon Image Sensortext::conference output::conference presentation