Aluminium nitride and lead zirconate-titanate thin films for ultrasonic applications : integration, properties and devices

Setter, NavaDubois, Marc-Alexandre2005-03-162005-03-16199910.5075/epfl-thesis-2086https://infoscience.epfl.ch/handle/20.500.14299/210710enAluminium nitride and lead zirconate-titanate thin films for ultrasonic applications : integration, properties and devicesthesis::doctoral thesis