Lagosh, AntonHuszka, GergelySattari, HamedAhlers, BeritGuldimann, BenediktKerr, GregoireMelozzi, MauroRahnama, PeymanNishizawa, TakeshiQuack, Niels2021-09-252021-09-252021-09-252021-01-0110.1117/12.2583149https://infoscience.epfl.ch/handle/20.500.14299/181679WOS:000691782700018We present the concept and detailed design of a Smart Slit Assembly for next generation spectrometers, and we experimentally demonstrate operation of an individual 221 mu m x 111 mu m smart slit channel employing a MEMS actuated shutter to continuously modulate the intensity of the optical input signal. The MEMS actuated shutter is fabricated in a 211 mu m thick device layer of a Silicon-On-Insulator wafer by Deep Reactive Ion Etching. Electrostatic comb drive actuators allow an absolute displacement of 52 mu m at 74 V, resulting in a continuously tunable shutter efficiency of up to 99.97% at an operating wavelength of 532 nm.Engineering, Electrical & ElectronicNanoscience & NanotechnologyOpticsEngineeringScience & Technology - Other Topicssmart slit assemblyoptical memsrectangular waveguidemultimode fibervariable optical attenuatorswitchtext::conference output::conference proceedings::conference paper