Preface: Special Issue: Euromat 2011-European Congress and Exhibition on Advanced Materials and Processes: Symposium A53 MEMS/NEMS for Sensorial and Actorial Materials

Lehmhus, DirkBrugger, JuergenMuralt, PaulPane, SalvadorErgeneman, OlgacBradley, NelsonDubois, Marc-AlexandreDe Rooij, NicolasGupta, NikhilBusse, Matthias2014-02-172014-02-17201310.1177/1045389X13507157https://infoscience.epfl.ch/handle/20.500.14299/100818WOS:000329489900003Preface: Special Issue: Euromat 2011-European Congress and Exhibition on Advanced Materials and Processes: Symposium A53 MEMS/NEMS for Sensorial and Actorial Materialstext::journal::journal article::research article