Kippenberg, TobiasGavartin, Emanuel2013-05-232013-05-23201310.5075/epfl-thesis-5726https://infoscience.epfl.ch/handle/20.500.14299/92368urn:nbn:ch:bel-epfl-thesis5726-2ennanomechanicsoptomechanicsNEMSforce transducerfeedback coolingfrequency stabilizationphotonic crystal defect cavitythesis::doctoral thesis