Villanueva, G.Vazquez-Mena, O.van den Boogaart, M.A.F.Sidler, K.Savu, V.Brugger, J.2007-09-252007-09-252007https://infoscience.epfl.ch/handle/20.500.14299/12437Etching of sub-micrometer structures through Stenciltext::conference output::conference presentation