Li, Hung-WeiMasserey, CyrilleMartinolli, NiccoloStolichnov, IgorIonescu, Adrian2025-08-262025-08-262025-08-252025-06-2910.1109/transducers61432.2025.11109140https://infoscience.epfl.ch/handle/20.500.14299/253536This work presents a CMOS-compatible multilayer platform integrating energy storage and tunable varactor functionality within a compact system. By co-integrating antiferroelectric (AFE) and dielectric (DE) layers, the design achieves tunability up to 28%, an energy density of 52 J/cm3, and enhanced electrical breakdown strength of 5.8 MV/cm. The proposed architecture enables multifunctionality in a scalable on-chip approach, optimizing both energy efficiency and adaptive electronic applications. This experimental advancement offers a promising foundation for compact, high-performance AFE-based alternative to conventional single-purpose ferroelectric (FE) devices.enAntiferroelectricEnergy StorageTunabilityVaractortext::conference output::conference proceedings::conference paper