Microfabricated Electrical Connector for Atomic Force Microscopy Probes with Integrated Sensor/Actuator

Akiyama, T.Staufer, U.de Rooij, N. F.2009-05-122009-05-122009-05-12200210.1143/JJAP.41.4332https://infoscience.epfl.ch/handle/20.500.14299/38928Microfabricated Electrical Connector for Atomic Force Microscopy Probes with Integrated Sensor/Actuatortext::journal::journal article::research article