Wyrsch, N.Miazza, C.Dunand, S.Ballif, C.Shah, A.Despeisse, M.Moraes, D.Jarron, P.2009-02-102009-02-10200510.1557/PROC-862-A15.4https://infoscience.epfl.ch/handle/20.500.14299/35111Radiation hard amorphous silicon particle sensorstext::conference output::conference proceedings::conference paper