Quack, NielsRüst, PhilippBlunier, StefanDual, JurgFelder, FerdinandRahim, MohamedFill, MatthiasArnold, MartinZogg, Hans2015-07-072015-07-072015-07-07200910.1016/j.mee.2008.12.064https://infoscience.epfl.ch/handle/20.500.14299/115913The realization of a vertically moving micromirror using electrostatic actuation in a comb drive configuration is presented. The micromirror is designed for the use in tunable mid-infrared Resonant Cavity Enhanced Detectors (RCEDs). It can be displaced more than 2.5 μm with less than 30 V actuation voltage. In addition to the pure out-of-plane movement, the mirror can be tilted by applying different voltages at the different comb drive actuators. A voltage difference of 30 V on opposite comb drive actuators induces a mirror tilt of 0.23°. Measured spectra of a tunable RCED employing the presented micromirror are included.Fabry-perotIR-detectorMEMSMicromirrorMicrospectrometerMid-infraredRCEDTunabletext::journal::journal article::research article