Henein, SimonBarrot, F.Jeanneret, SFournier, F.Giriens, L.Gumy, M.Droz, S.Toimil, M.2022-11-282022-11-282011-05-26https://infoscience.epfl.ch/handle/20.500.14299/192792Fracture tests have been performed on 333 flexure hinges of various shapes machined in monocrystalline silicon by Deep Reactive Ion Etching. The results show the significant effects of stress concentration, crystalline orientation and surface treatments on the fracture stress levels. A Delta-Robot with a size of a sugar cube has been manufactured as a demonstrator.text::conference output::conference proceedings::conference paper