Wyrsch, N.Miazza, C.Dunand, S.Shah, A.Moraes, D.Anelli, G.Despeisse, M.Jarron, P.Dissertori, G.Viertel, G.2009-02-102009-02-10200410.1557/PROC-808-A10.7https://infoscience.epfl.ch/handle/20.500.14299/35081Vertically Integrated Amorphous Silicon Particle Sensorstext::conference output::conference proceedings::conference paper