An Investigation of the Hydration Properties of Chemically Vapour-deposited Silicon Dioxide Films by Means of Ellipsometry

de Rooij, N. F.Sieverdink, R. J. S.Tromp, R. M.2009-05-122009-05-122009-05-12197710.1016/0040-6090(77)90036-0https://infoscience.epfl.ch/handle/20.500.14299/39801An Investigation of the Hydration Properties of Chemically Vapour-deposited Silicon Dioxide Films by Means of Ellipsometrytext::journal::journal article::research article