Jurków, DominikMaeder, ThomasDąbrowski, ArkadiuszSanto Zarnik, MarinaBelavič, DarkoBartsch de Torres, HeikeMüller, Jens2015-06-012015-06-012015-06-01201510.1016/j.sna.2015.05.023https://infoscience.epfl.ch/handle/20.500.14299/114862WOS:000362856200016Low Temperature Co-fired Ceramics (LTCC) is one of the microelectronic techniques. This technology was initially developed as an alternative to Printed Circuit Boards (PCB) and classical thick-film technology, and it has found application in the fabrication of multilayer ceramic boards for electronic devices. Fast and wide development of this technology permitted the fabrication of 3D mechanical structures and integration with various different processes. Thanks to this, LTCC has found application in the manufacturing of various microelectronic devices. This paper presents an overview on LTCC technology and gives a detailed summary on physical quantity sensors fabricated using LTCC technique.Technologie couches épaissesCouches épaissesThick-film technologyLTCCCéramique co-cuite basse températureLow-temperature coffered ceramicCapteursSensorsStructurationCéramiquesCeramicsMatériauxMaterialstext::journal::journal article::research article